The effect of liquid-phase epitaxy in improving the breakdown behaviour of Schottky diodes was examined. This technique served to fill-in large-area open-core screw dislocation defects (micro-pipes), but had not been studied with regard to its impact upon other smaller closed-core screw dislocations. Statistical analysis of breakdown voltages in small-area diodes revealed no significant difference in breakdown voltage due to such defects.

4H-SiC Device Scaling Development on Repaired Micropipe Substrates. T.E.Schattner, J.B.Casady, M.C.D.Smith, M.S.Mazzola, V.A.Dimitriev, S.V.Rentakova, S.E.Saddow: Materials Science Forum, 2000, 338-342, 1203-6