The coefficients were deduced from the desorption spectra of water; measured in a SiO2/spin-on-glass/Si system. The spun-on glass film was used as a water source. The results could be described by:

D (μ2/s) = 7.0 x 102 exp[-1.0(eV)/kT]

The coefficients which were measured by using this method indicated a high water-blocking power, as compared with fused silica.

Y.Takahashi, H.Namatsu, K.Machida, K.Minegishi: Japanese Journal of Applied Physics - II, 1993, 32[3B], L431-3