A previous study of oxidized 6H-type material had used electron paramagnetic resonance methods to study a defect centre that was present after oxidation and dry heat-treatment. The spectroscopic and annealing characteristics of this centre indicated that it was likely to be a C dangling bond which was made electron paramagnetic resonance-active by the release of a H species during dry heat-treatment. A study was made here of the effects of various oxidation parameters upon the number density of the centres which were produced. It was found that the termination procedure of the oxidation process had the greatest effect upon the centre-concentration.

Effects of Oxidation Conditions on the Concentration of Carbon Dangling Bonds in Oxidized 6H-SiC. P.J.Macfarlane, M.E.Zvanut: Materials Science Forum, 2000, 338-342, 1125-8