An interdiffusion study was made of a 20nm-period laser molecular beam epitaxially grown saw-tooth superlattice. The asymmetry due to the saw-tooth structure was clearly visible in Auger sputtering depth-profiles. A change in the average composition, as well as a 5% variation in the layer thickness, was observed.

E.H.Cirlin, P.Ireland, S.Buckingham, O.Wu: Journal of Vacuum Science and Technology A, 1988, 6[4], 2631-6