Diffusion anneals were carried out at temperatures ranging from 20 to 270C in evacuated silica ampoules, using diffusion sources of elemental I or CdI2; both under saturated vapor pressure conditions. The concentration profiles were measured by using radio-tracer/sectioning or secondary ion mass spectrometric techniques. It was found that the profiles comprised 4 sections (table 5). A computer analysis which was based upon the sum of 4 complementary error functions gave satisfactory agreement with the data. The fastest diffusing component furnished diffusivity values which agreed with previously published data, but the overall results indicated that I which was diffused into CdTe from the vapor was not suitable as a long-term stable dopant when sharp junctions were required.
E.D.Jones, J.Malzbender, J.B.Mullin, N.Shaw: Journal of Crystal Growth, 1994, 138, 279-84
Table 5
Diffusivity of I in CdTe
Temperature(C) | Source | Sample | Section | Diffusivity(cm2/s) |
20 | I | bulk | 1 | 3 x 10-17 |
20 | I | bulk | 2 | 1 x 10-16 |
20 | I | bulk | 3 | 2.5 x 10-15 |
20 | I | bulk | 4 | 3 x 10-14 |
270 | CdI2 | bulk | 1 | 2 x 10-18 |
270 | CdI2 | bulk | 2 | 3 x 10-17 |
270 | CdI2 | bulk | 3 | 4 x 10-15 |
270 | CdI2 | bulk | 4 | 3 x 10-12 |
20 | CdI2 | bulk | 1 | 2 x 10-20 |
20 | CdI2 | bulk | 2 | 6 x 10-19 |
20 | CdI2 | bulk | 3 | 3 x 10-17 |
20 | CdI2 | bulk | 4 | 2 x 10-14 |
85 | CdI2 | epitaxial | 1 | 5 x 10-20 |
85 | CdI2 | epitaxial | 2 | 4 x 10-18 |
85 | CdI2 | epitaxial | 3 | 3 x 10-16 |
85 | CdI2 | epitaxial | 4 | 9 x 10-14 |