The electron spin resonance spectra of dangling bonds in amorphous hydrogenated material were analyzed before and after a strong illumination which gave rise to light-induced annealing of the dangling bonds. The spectra were deconvoluted into 2 components, one of which was due to normal dangling bonds and one of which was due to H-related dangling bonds. The normal dangling bonds constituted some 60% of the total spin density, both before and after prolonged illumination, while the H-related dangling bonds constituted about 40%. However, the photo-annealed densities of the 2 types of dangling bond were found to be different after strong illumination.

Electron spin resonance study of the light-induced annealing of dangling bonds in glow discharge hydrogenated amorphous silicon K.Takeda, H.Hikita, Y.Kimura, H.Yokomichi, K.Morigaki: Japanese Journal of Applied Physics - 1, 1998, 37[12A], 6309-17