A Raman spectroscopic study was made of float-zone crystalline material after exposure to a H plasma. New lines at 3601 and 2622/cm were attributed to vibrational excitations of H2 and D2 molecules, respectively, which were positioned at tetrahedral interstitial sites within the lattice.

Raman spectroscopy of hydrogen molecules in crystalline silicon A.W.R.Leitch, V.Alex, J.Weber: Physical Review Letters, 1998, 81[2], 421-4