The topic of point-defect injection during Sb precipitation was considered. By studying the effect of Sb precipitation in an Sb-box distribution upon the diffusion of B or Sb in deeper-lying spikes, it was concluded that Si self-interstitials were injected during the precipitation process.

Sb precipitation-induced injection of Si self-interstitials in Si P.Gaiduk, J.Fage-Pedersen, J.L.Hansen, A.N.Larsen: Physical Review B, 1999, 59[11], 7278-81