The effect of He ion bombardment upon the H content and structure of amorphous hydrogenated film samples was studied. A comparison of elastic recoil detection and Fourier transform infra-red spectroscopic results showed that significant H depletion occurred at the same time as a marked change in the film structure. An examination of H profiles in the film indicated that the diffusion length of molecular H in these materials during bombardment was between 160 and 320nm.

M.J.Paterson, K.G.Orrman-Rossiter, S.Bhargava, A.Hoffman: Journal of Applied Physics, 1994, 75[2], 792-6