Defects on thin epitaxial insulating (100) films, which were generated during growth and electron bombardment, were investigated by means of high-resolution spot profile analysis during low-energy electron diffraction, photoelectron spectroscopy, electron energy-loss spectroscopy and thermal desorption spectroscopy. The samples contained morphological defects. Films which were grown onto Ag(100) exhibited a broadened (1 x 1) pattern in low-energy electron diffraction, due to the formation of mosaics. An anion-vacancy defect structure, with losses at 2.1 and 3.3eV, could be produced by the incomplete desorption of metallic Mg from the (100) oxide surface.

Defects in Epitaxial Insulating Thin Films. C.Tegenkamp, H.Pfnür, W.Ernst, U.Malaske, J.Wollschläger, D.Peterka, K.M.Schröder, V.Zielasek, M.Henzler: Journal of Physics - Condensed Matter, 1995, 11[49], 9943-54