This multi-layer system was studied at 120 to 250C, by means of Auger electron spectroscopy, together with simultaneous Ar-ion sputtering. The interdiffusion coefficients were calculated on the basis of changes in the concentration amplitude of the multi-layer structure, and variations in the composition at the interfaces of 2 consecutive layers of the multi-layer. The depth resolution was determined and its effect upon interdiffusion was evaluated.

Influence of Depth Resolution on Interdiffusion Measurements in Polycrystalline Cu/Pd Multilayers. A.Bukaluk: Surface and Interface Analysis, 2000, 30[1], 597-602