The kinetics of this process were measured in epitaxial (001) and (111) multi-layers, with a modulation wavelength of 2.5 to 4.0nm, by using X-ray diffraction methods. The multi-layers were prepared by electron-beam evaporation and were then annealed in vacuum at temperatures of between 275 and 375C. The activation enthalpy for interdiffusion in this temperature range was estimated by using a new approach for the scaling of non-linear diffusion data. The activation enthalpies for interdiffusion in the (001) and (111) multi-layers were deduced to be 1.1 and 0.8eV. The low values were attributed to the effect of coherency strains or to short-circuit diffusion in the faulted multi-layers.

P.C.McIntyre, D.T.Wu, M.Nastasi: Journal of Applied Physics, 1997, 81[2], 637-45