The change in the concentration profile, due to interdiffusion during annealing, was investigated by using Auger electron spectroscopic depth-profiling techniques and multi-layered films. It was observed that the initial concentration distributions, which were almost rectangular in the original samples, changed into sinusoidal ones in annealed films. The concentration-independent interdiffusion coefficients were deduced from the amplitudes of the sinusoidal distributions. The activation energy was estimated to be equal to 1.66eV, on the basis of an Arrhenius plot of the data (table 131). The concentration-dependent interdiffusivity at 150C was also estimated by using the Boltzmann-Matano method.

Y.P.Lee, I.J.Jeon, J.H.Hong, J.H.Moon, J.I.Jeong, J.S.Kang: Materials Science Forum, 1995, 189-190, 411-6

Table 131

Interdiffusion Coefficients in Pd/Cu Multi-Layers