By using synchrotron radiation as a photon source, photoluminescence spectra were obtained from buried oxides that had been formed by O implantation. On the basis of the spectra, the oxide was deduced to contain relaxed and unrelaxed neutral O vacancies in concentrations of 1.4 x 1020 and 1017/cm3, respectively.

K.S.Seol, T.Futami, Y.Ohki: Journal of Applied Physics, 1998, 83[4], 2357-9