A special case (Bragg surface diffraction) of X-ray multiple diffraction was investigated following lattice damage due to the ion implantation of (001) samples. The Bragg surface diffraction profile was very sensitive to the diffraction regime (dynamic or kinematic) and provided information regarding crystalline perfection and lattice strains in directions which were parallel and perpendicular to the sample surface.

M.A.Hayashi, S.L.Morelhão, L.H.Avanci, L.P.Cardoso, J.M.Sasaki, L.C.Kretly, S.L.Chang: Applied Physics Letters, 1997, 71[18], 2614-6