Synergetic effects were observed for low-energy Ar+ ion bombardment, combined with low-temperature annealing, for producing clean and well-ordered (100) surfaces. Low-energy (50 to 300eV), mass-selected Ar+ bombardment of (100) surfaces was performed at temperatures ranging from 25 to 500C. The surfaces were characterized by means of  in situ  Auger electron spectroscopy, reflection high energy electron diffraction and  ex situ  atomic force microscopy. It was found that a clean and well-ordered surface could be obtained at a lower temperature when ion bombardment and annealing were applied simultaneously than if they were applied separately or sequentially. Almost ideal surfaces could be obtained by 100 to 200eV Ar bombardment at 400 to 500C. This synergy between ion bombardment and annealing was explained in terms of a sub-plantation model that included Ar+ defect complexes.

S.M.Lee, C.J.Fell, D.Marton, J.W.Rabalais: Journal of Applied Physics, 1998, 83[10], 5217-23