Experimental observations were made of the macroscopic migration of implanted D by using a new method in which the implanted D concentrations were measured by counting the protons which were emitted, due to the nuclear reaction 2H(d,p)3H, from the implanted region. The results supported a new model in which the macroscopic migration of gas bubbles containing implanted D, as molecules, occurred in the implanted region.

Macroscopic Migration of Implanted Deuterium along a Gas-Bubble Network in Silicon T.Katabuchi, N.Kawachi, Y.Tagishi: Journal of Applied Physics, 1999, 86[6], 3030-5