It was recalled that the out-diffusion of Zn at 1107C had been claimed to be explainable only by a vacancy equilibrium concentration of the order of 1015/cm3. However, this contradicted other data. A numerical investigation which based upon published Zn out-diffusion profiles led here to the conclusion that the profiles could also be explained by significantly lower equilibrium vacancy concentrations.

Extraction of Vacancy Parameters from Out-Diffusion of Zinc from Silicon P.Pichler: Solid State Phenomena, 1999, 69-70, 455-60