Actual shape of the diamond spherical indenter of nominal radius 20 μm was investigated in this study. 3D reconstruction was performed by atomic force microscope and by the method of stereopair using SEM images of the tip taken under several different angles. The results were compared with the shape obtained indirectly by the calibration performed on specimens with known Young’s modulus. It was found that lower effective values of tip radius for the small penetration depths are caused by the irregular geometry of contact between indenter and specimen surface. With increasing penetration depth the radius increased to the theoretical values and it decreased again for high penetration depths. The stress-strain curves were determined using corrected effective indenter radius.