Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD

Abstract:

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Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated.

Info:

Edited by:

M. Gupta and Christina Y.H. Lim

Pages:

31-34

DOI:

10.4028/www.scientific.net/JMNM.23.31

Citation:

C. Popov et al., "Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD", Journal of Metastable and Nanocrystalline Materials, Vol. 23, pp. 31-34, 2005

Online since:

January 2005

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Price:

$35.00

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