Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD
Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated.
M. Gupta and Christina Y.H. Lim
C. Popov et al., "Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD", Journal of Metastable and Nanocrystalline Materials, Vol. 23, pp. 31-34, 2005