Development of a Novel Micro-Spray-Assembly Process for Multilayer Ultra-Thin Film Formation
A novel micro-spray-assembly process and an automatic device to fabricate multilayer ultra-thin film are introduced. Employing self-assembly monolayer (SAM) technique, ultra-thin film can be assembled by utilizing the micro-spray-assembly device. The thickness and roughness of each monolayer can be controlled by varying various materials attributes, i.e., deposition time, ionic strength, pH value, molecular concentration and by selecting different manufacturing parameters of the automatic device such as spraying rate, size of micro-drop, N2 flow rate, temperature of N2 flow.
M. Gupta and Christina Y.H. Lim
Z. Peng and L. X. Kong, "Development of a Novel Micro-Spray-Assembly Process for Multilayer Ultra-Thin Film Formation", Journal of Metastable and Nanocrystalline Materials, Vol. 23, pp. 331-334, 2005