Micro- and Nanotextured Silicon for Antireflective Coatings of Solar Cells

Abstract:

Article Preview

The paper deals with obtaining of textured silicon surfaces by chemical etching. As a result of experiments based on the modification and optimization of obtaining a textured silicon, several methods of chemical texturing of the crystalline silicon surface were developed. It was shown that modified isotropic and anisotropic etching methods are applicable to create a microrelief on the surface of silicon substrate. These methods in addition to their high conversion efficiency can be used for both mono- and multicrystalline silicon which would ensure their industrial use.

Info:

Periodical:

Edited by:

Prof. Alexei N. Nazarov, Prof. Volodymyr S. Lysenko, Prof. Denis Flandre, Dr. Yuri V. Gomeniuk

Pages:

89-95

Citation:

A. Druzhinin et al., "Micro- and Nanotextured Silicon for Antireflective Coatings of Solar Cells", Journal of Nano Research, Vol. 39, pp. 89-95, 2016

Online since:

February 2016

Export:

Price:

$41.00

* - Corresponding Author

[1] N. Zakharov, P. Werner, G. Gerth, L. Schubert, L. Sokolov, U. Gosele, Growth phenomena of Si and Si/Ge nanowires on Si (111) by molecular beam epitaxy, Journal of Crystal Growth 290 (2006) 6-10.

DOI: https://doi.org/10.1016/j.jcrysgro.2005.12.096

[2] Y. Zhang, Y. Tang, N. Wang, D. Yu, C. Lee, I. Bello, S. Lee, Silicon nanowires prepared by laser ablation at high temperature, Appl. Phys. Lett. 72 (1998) 1835-1837.

DOI: https://doi.org/10.1063/1.121199

[3] Y. Wu, R. Fan, P. Yang, Block-by-block growth of single-crystalline Si/SiGe superlattice nanowires, Nano Lett. 2 No2 (2002) 83-86.

DOI: https://doi.org/10.1021/nl0156888

[4] C. Deng, W. Sigmon, G. Giust, J. Wu, M. Wybourne, Novel scheme to fabricate SiGe nanowires using pulsed ultraviolet laser induced epitaxy, J. Vac. Sci. Technol. A 14 (1996) 1860-1863.

DOI: https://doi.org/10.1116/1.580350

[5] Q.X. Liu, C.X. Wang, N.S. Xu, G.W. Yang, Nanowire formation during catalyst assisted chemical vapor deposition, Phys. Rev. B72 (2005) 085417-085420.

DOI: https://doi.org/10.1103/physrevb.74.239904

[6] W. Lu, C. Lieber, Semiconductor nanowires, J. Phys. D: Appl. Phys. 39 (2006) R387-R406.

[7] A. Druzhinin, A. Evtukh, I. Ostrovskii, Yu. Khoverko, S. Nichkalo, and S. Dvornytskyi, Technological approaches for growth of silicon nanowire arrays, Springer Proceedings in Physics 156 (2015) 301-308.

DOI: https://doi.org/10.1007/978-3-319-06611-0_24

[8] A. Evtukh, A. Druzhinin, I. Ostrovskii, A. Kizjak, A. Grigoriev, O. Steblova, S. Nichkalo, Formation of ordered Si nanowires arrays on Si substrate, Advanced Materials Research 854 (2014) 83-88.

DOI: https://doi.org/10.4028/www.scientific.net/amr.854.83

[9] A. Druzhinin, I. Ostrovskii, V. Yerokhov, Yu. Khoverko, S. Nichkalo, Iu. Kogut, Si nanowires for antireflective coatings of photovoltaic cells, Modern Problems of Radio Engineering, Telecommunications and Computer Science – Proceedings of the 11th International Conference, TCSET'2012, 484 (Lviv-Slavske: Publishing House of Lviv Polytechnic: 2012).

DOI: https://doi.org/10.1109/tcset.2016.7452059

[10] S. Chattopadhyay, Y.F. Huang, Y.J. Jen, et al., Anti-reflecting and photonic nanostructures, Mater. Sci. Eng. R 69 (2010) 1–35.

[11] B. Swatowska, T. Stapinski, K. Drabczyk, P. Panek, The role of antireflective coatings in silicon solar cells – the influence on their electrical parameters, Optica Applicata XLI No2 (2011), 487-492.

[12] A. Rahman, A. Ashraf, H. Xin, X. Tong, et al. Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells, Nature Communications 6 (2015) 5963-5967.

DOI: https://doi.org/10.1038/ncomms6963

[13] V. Holota, I. Kogut, A. Druzhinin, Y. Khoverko, High sensitive active MOS photodetector on local 3D SOI-structure, Advanced Materials Research, 854 (2014) 45-47.

DOI: https://doi.org/10.4028/www.scientific.net/amr.854.45

[14] M. Halbwax, T. Sarnet, P. Delaporte, Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication, Thin Solid Films 516 (2008) 6791-6795.

DOI: https://doi.org/10.1016/j.tsf.2007.12.117

[15] V.Y. Yerokhov, R. Hezel, M. Lipinski, R. Ciach, H. Nagel, A. Mylyanych, P. Panek, Cost-effective methods of texturing for silicon solar cells, Solar Energy Materials and Solar Cells 72 No1-4 (2002) 291-298.

DOI: https://doi.org/10.1016/s0927-0248(01)00177-5

[16] A.I. Manilov, V.A. Skryshevsky, Hydrogen in porous silicon — A review, Materials Science and Engineering B 178(15) (2013) 942-955.

DOI: https://doi.org/10.1016/j.mseb.2013.05.001

[17] Y.T. Cheng, J.J. Ho, W.J. Lee, S.Y. Tsai, et al., Investigation of low-cost surface processing techniques for large-size multicrystalline silicon solar cells, International Journal of Photoenergy 2010 (2010) 6 pages.

[18] M. Lipinski, Macroporous texturing of multicrystalline silicon for solar cells, Archives of Metallurgy and Materials 53 No1 (2008) 185-187.

[19] K. Ali, S. Khan, M. Mat Jafri, Effect of double layer (SiO2/TiO2) anti-reflective coating on silicon solar cells, Int. J. Electrochem. Sci. 9 (2014) 7865-7874.

[20] M. Lipinski, P. Zieba, S. Jonas, S. Kluska, M. Sokołowski, H. Czternastek, Optimisation of SiNx: H layer for multicrystalline silicon solar cells, Opto-Electronics Review 12 No1 (2004) 41-44.

[21] Shui-Yang Liena. Tri-layer antireflection coatings (SiO2/SiO2–TiO2/TiO2) for silicon solar cells using a sol–gel technique [Text] / Shui-Yang Liena, Dong-Sing Wuua, Wen-Chang Yeh / Solar Energy Materials & Solar Cells. – 2006. – Vol. 90. – P. 2710–2719.

DOI: https://doi.org/10.1016/j.solmat.2006.04.001

[22] A. Druzhynin, V. Holota, I. Kogut, S. Sapon and Y. Khoverko, The device-technological simulation of the field-emission micro-cathodes based on three-dimensional SOI-structures, ECS Transactions 14 No1 (2008), 569-580.

DOI: https://doi.org/10.1149/1.2956075

[23] A. Druzhinin, Yu. Khoverko, I. Kogut, R. Koretskii, Properties of low-dimentional polysilicon in SOI structures for low temperature sensors, Advanced Materials Research 854 (2014) 49-55.

DOI: https://doi.org/10.4028/www.scientific.net/amr.854.49

[24] A.A. Druzhinin, V. Yu. Yerokhov, S.I. Nichkalo, Y.I. Berezhanskyi, M.V. Chekaylo, Texturing of the silicon substrate with nanopores and Si nanowires for anti-reflecting surfaces of solar cells, Journal of Nano- and Electronic Physics 7 No2 (2015).

DOI: https://doi.org/10.1109/elnano.2015.7146885