Optical and Surface Morphology Characterization of Nanometric Palladium Films on Silicon Substrates Annealed in Hydrogen Atmosphere


Article Preview

The influence of hydrogen (H2) loading on optical and surface characteristics of nanometric palladium films was studied. Pd films were deposited on silicon substrates by electroless method. H2 loading was realized by annealing the Pd films in H2 atmosphere at 585 Torr over the temperature range of 200-500°C. Pd films with initial thickness under 40 nm were chosen to observe incomplete covering effects. Refractive index measurement was used to monitor the H2 loading. Changes on refractive index and surface morphology are related to the existence of a and b phases in Pd-H system.



Edited by:

Velumani S., R. Asomoza and Umapada Pal




C. López Rodríguez et al., "Optical and Surface Morphology Characterization of Nanometric Palladium Films on Silicon Substrates Annealed in Hydrogen Atmosphere", Journal of Nano Research, Vol. 9, pp. 83-88, 2010

Online since:

February 2010




[1] T. Graham: Proc. Roy. Soc. 17 (1869) 212.

[2] A. Mandelis, C. Christofides: Physics, chemistry and technology of Solid State gas sensor devices, edited by J.D. Winefordner, Vol. 125, Chemical Analysis: A series of Monographs on Analytical Chemistry, New York, NY (1993).

[3] Okuyama, Y. Mitobe, K. Okuyama and K. Matsushita: Jpn. J. Appl. Phys. 39 (2000)3584.

[4] M. Wilde, K. Fukutani, M. Naschitzki and H.J. Freund: Phys. Rev. B 77 (2008) 113412-1.

[5] R. J. White, V. Budarin, R. Luque, J.H. Clark and D.J. Macquarrie: Chem. Soc. Rev. 38 (2009) 481-494.

[6] J. D. Fast: Gases in Metals, edited The Macmillan Press Ltd., Series title Philips Technical Library, London (1976).

[7] G. Alefeld and J. Volki (eds): Hydrogen in Metals I and II, volumes 28 and 29, Series Topics and Applied Physics, Berlin: Springer -Verlag (1978).

[8] R. Caputo and A. Alavi: Molecular Phys. 101(11) (2003) 1781.

[9] K. Kalli, A. Othonos and C. Christofides: J. Appl. Phys. 91 (2002)3829.

[10] A. M. Doyle, Sh. K. Shaikhutdinov and H. -J. Freund: J. Catalysis 223 (2004) 444.

[11] C. Sachs, A. Pundt, R. Kirchheim, M. Winter, M. T. Reetz and D. Fritsch: Phys. Rev. B 64 (2001) 075408.

[12] L. Seals , J. L. Gole, L. A. Tse and P. J. Hesketh: J. Appl. Phys. 91 (2002) 2519-23.

[13] N. Joshi, D.K. Aswal and A.K. Debnath: Appl. Surf. Sci. 228 (2004)302.

[14] C. Simonetta and S. Pietro: Encyclopedie of Nanoscience and Nanotechnology, edited H. S. Nalwa, Vol. 3 (2004).

[15] L. Pedrero, R. Peña and, G. Romero: Gas Sensors Based on Porous Silicon and PdO, 1st International. Conference on Electrical and Electronics Engineering (ICEEE) and X Conference on Electrical Engineering (CIE-2004). Acapulco Guerrero; Méx., Sep 8-10, (2004).

DOI: https://doi.org/10.1109/iceee.2004.1433892

[16] C. López, L. Pedrero, R. Peña and G. Romero: Proceedings 2nd International Conference on Electrical and Electronics Engineering (ICEEE) and XI Conference on Electrical Engineering Mexico City, September 7-9 (2005), p.428.

DOI: https://doi.org/10.1109/iceee.2005.1529661