CVD of SrBi2Ta2O9(SBT) Thin Film from Bi(CH3)3 - Sr[Ta(O·C2H5)6]2 - O2 System

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Periodical:

Key Engineering Materials (Volumes 169-170)

Edited by:

N. Mizutani, K. Shinozaki, N. Kamehara, T. Kimura

Pages:

145-148

DOI:

10.4028/www.scientific.net/KEM.169-170.145

Citation:

N. Nukaga et al., "CVD of SrBi2Ta2O9(SBT) Thin Film from Bi(CH3)3 - Sr[Ta(O·C2H5)6]2 - O2 System", Key Engineering Materials, Vols. 169-170, pp. 145-148, 1999

Online since:

June 1999

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$35.00

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