Improvement in the Ground Surface Roughness of Fused Silica X-Ray Mirror with ELID-Grinding

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

143-146

DOI:

10.4028/www.scientific.net/KEM.238-239.143

Citation:

W. M. Lin et al., "Improvement in the Ground Surface Roughness of Fused Silica X-Ray Mirror with ELID-Grinding", Key Engineering Materials, Vols. 238-239, pp. 143-146, 2003

Online since:

April 2003

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$35.00

[1] H. Ohmori, Y. Yamagata, S. Moriyasu, S. Morita, and W. Lin: Development of Large Ultraprecision Grinding System with ELID for Aspheric Optical Elements and Components, 9 th International Conference on Production Engineering, Osaka, Japan, (August 29-September 1, 1999) 147-152.

DOI: 10.1142/9789812817822_0020

[2] H. Ohmori, and T. Nakagawa: Mirror Surface Grinding of Silicon Wafer with Electrolytic In-process Dressing, ANNALS of the CIRP, 39, 1, (1990) 329-332.

DOI: 10.1016/s0007-8506(07)61065-8

[3] H. Ohmori: Electrolytic in-process dressing (ELID) grinding technique for ultraprecision mirror surface machining, International Journal of the Japan Society for Precision Engineering, 26, 4 (1992) 273-278.

DOI: 10.2493/jjspe.59.1451

[4] H. Ohmori, and T. Nakagawa: Analysis of Mirror Surface Generation of Hard and Brittle Materials by ELID (Electrolytic In-Process Dressing) Grinding with Superfine Grain Metallic Bond Wheels, ANNALS of the CIRP, 44, 1, (1995) 287-290.

DOI: 10.1016/s0007-8506(07)62327-0

[5] Kazuhito Nishimura, Weimin Lin, and Hitoshi Ohmori: Mirror-surface finishing of CVD diamond film by ELID grinding, New Diamond and Frontier Carbon Technology, 10, 3 (2000) 151-160.

[6] Weimin Lin, Hitoshi Ohmori, Yutaka Yamagata, and Sei Moriyasu: Nano Surface Fabricated of X-Ray Mirrors with ELID-grinding by Large Ultraprecision Aspheric Optics ELID-grinder", International Symposium of Advanced Manufacturing Technology ISAMT, 2001, Nanjing, China, (October 27-29, 2001) 192-197.

DOI: 10.1364/fta.1999.ga4

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