Deformation Patterns of a Micropositioning Table under a Moving Force

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

363-368

Citation:

Y. Gao et al., "Deformation Patterns of a Micropositioning Table under a Moving Force", Key Engineering Materials, Vols. 238-239, pp. 363-368, 2003

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April 2003

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