Atomic Oxygen (AO) is a main constituent of the atmosphere on low earth orbit where the International Space Station (ISS) goes around, and is also known as the matter which deteriorate many kinds of polymers. However, the strength properties of polymers suffered from AO have not been fully clarified. To investigate this problem, we irradiated AO to Poly-Ether-Ether-Keton (PEEK) films under three kinds of tensile stresses. Based on the analysis of irradiated samples, the effects of AO fluence (total amount of AO per unit area) and tensile stresses on damage properties were discussed with regard to reaction efficiency Re, surface morph, and tensile strength properties. As a result, the following were obtained: (1) Test piece surfaces exhibited considerable damage covered by conical pits of 1μm sizes with a few μm depths. (2) Test piece thickness of irradiated area decreased almost proportionally to AO fluence. (3) Re and thickness reduction was accelerated by tensile stress. (4) Strength properties after AO irradiation were almost same as those of a pristine sample considering the decrease of specimen thickness.