Thermo-Mechanical Stress in Passivated Al-0.5%Cu Thin Films
The volume-averaged hydrostatic parts of thermo-mechanical stresses in the metal interconnect line determined by XRD method and finite element method are compared with each other. Two typical shapes of passivated Al-0.5%Cu thin film with SiN or FOx(Flowable Oxide) are selected for this study. For the numerical calculation, the stress concentration effect around the edge of Al-Cu thin film and elastic-plastic behavior of the film following its hardening rule are considered. For the stress obtained by XRD, the experimental results of Park and Jeon[Microelectron. Eng., 69 (2003) p.26] are introduced. A good agreement is found between the volume-averaged hydrostatic stresses obtained from each method.
Kikuo Kishimoto, Masanori Kikuchi, Tetsuo Shoji and Masumi Saka
I. Jeon et al., "Thermo-Mechanical Stress in Passivated Al-0.5%Cu Thin Films", Key Engineering Materials, Vols. 261-263, pp. 507-512, 2004