Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator


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Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee




S. H. Lee et al., "Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator ", Key Engineering Materials, Vols. 270-273, pp. 1095-1100, 2004

Online since:

August 2004




[1] H. K. Wickramasinghe: Acta Mater., Vol. 48, No. 1 (2000), pp.347-358.

[2] R. D. Piner, J. Zhu, F. Xu, S. Hong, and C. A. Mirkin: Science Vol. 283 (1999), pp.661-663.

[3] S. H. Lee, S. S. Lee, J. U. Jeon, and K. -C. Ro: IEEE The Sixteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan (2003), p.7275.

DOI: 10.1109/memsys.2003.1189690

[4] S. Hong, J. Woo, H. Shin, J. U. Jeon, Y. E. Pak, E. L. Colla, N. Setter, E. Kim, and K. No: J. App. Phys., Vol. 89, No. 2 (2001), pp.1377-1386.

[5] H. Shin, K. Lee, W. Moon, J. U. Jeon, Y. E. Pak, J. H. Park, and K. H. Yoon: IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 47, No. 4 (2000), pp.801-807.

DOI: 10.1109/58.852061

[6] C. H. Ahn, T. Tybell, L. Antognazza, K. Char, R. H. Hammond, M. R. Beasley, Ø. Fischer, and J. -M. Triscone: Science, Vol. 276 (1997), pp.1100-1103.

[7] K. Franke, J. Besold, W. Haessler, and C. Seegebarth: Surface Science Letters, Vol 302 (1994), L283-L288.

DOI: 10.1016/0039-6028(94)91089-8

[8] T. Hidaka, T. Maruyama, M. Saitoh, N. Mikoshiba, M. Shimizu, T. Shiosaki, K. A. Wills, R. Hiskes, S. A. Dicarolis, and J. Amano: Appl. Phys. Lett., Vol. 68 (1996), pp.2358-2359.

DOI: 10.1063/1.115857

[9] S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate: Rev. Sci. Instrum., Vol. 67, No. 9 (1996), pp.3294-3297.

[10] T. Sulchek, S. C. Minne, J. D. Adams, D. A. Fletcher, A. Atalar, and C. F. Quate: Appl. Phys. Lett., Vol. 75, No. 11 (1999), pp.1637-1639.

[11] Y. Kim, H. Nam, S. Cho, J. Hong, D. Kim, and J. U. Bu: Sens. Actuators A, Vol. 103, No. 1-2 (2003), pp.122-129.

[12] P. Vettiger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig: IBM J. Res. Develop., Vol. 44, No. 3 (2000), pp.323-340.

DOI: 10.1147/rd.443.0323

[13] M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, and C. Quate: Sens. Actuators, Vol. 73 (1999), pp.89-94.

DOI: 10.1016/s0924-4247(98)00259-3

[14] F. R. Blom, D. J. Yntema, F. C. M. van De Pol, M. Elwenspoek, J. H. J. Fluitman, and TH. J. A. Popma: Sens. Actuators A, Vol. 21-23 (1990), pp.226-228.

[15] T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate: J. Vac. Sci. Technol. A, Vol. 8, No. 4 (1990), pp.3386-3396.

[16] Irving H. Shames: Introduction to solid mechanics (Prentice Hall, 1989).

[17] S. C. Minne, S. R. Manalis, and C. F. Quate: Bringing scanning probe microscopy up to speed (Kluwer academic publishers, 1999).

DOI: 10.1007/978-1-4615-5167-6_1

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