Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

1095-1100

DOI:

10.4028/www.scientific.net/KEM.270-273.1095

Citation:

S. H. Lee et al., "Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator ", Key Engineering Materials, Vols. 270-273, pp. 1095-1100, 2004

Online since:

August 2004

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$35.00

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