Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator

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Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

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1095-1100

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S. H. Lee et al., "Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator ", Key Engineering Materials, Vols. 270-273, pp. 1095-1100, 2004

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August 2004

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