A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves

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Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

41-45

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Y. Ju et al., "A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves ", Key Engineering Materials, Vols. 270-273, pp. 41-45, 2004

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August 2004

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[9] D.M. Pozar: Microwave Engineering, (Wiley, New York 1998). Fig. 5. Comparison of the conductivity σm, obtained by the millimeter-wave method and the conductivity σd, measured by the four-point-probe method 0 20 40 60 80 100 120 0 20 40 60 80 100 120 σd (S/m) σm (S/m) σm = σd ◆ measured.

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