Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber


Article Preview



Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee




N. Y. Kim and M. S. Hong, "Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber", Key Engineering Materials, Vols. 270-273, pp. 884-889, 2004

Online since:

August 2004




[1] Shinobu Yoshida, Yoshika Kawabe, and Tsuyoshi Takahashi, An Optimization Approach to Improving Eigenvalues of Light-Weight Beam Structures, JSME, International Journal, 1995, Series C. Vol. 38, No. 1, pp.23-28.

DOI: https://doi.org/10.1299/jsmec1993.38.23

[2] Y. Y. Kim and T. S. Kim, Structual Topology Optimization Using Approximate Homogenization Method, Proceedings of Korea CAD/CAM Conference, 1997, pp.259-264.

[3] C. J. Wilson and D. B. Bogy, An Experimental Modal Analysis Technique for Miniature Structures, ASME, Journal of Vibration and Acoustics, JANUARY 1996, Vol. 118, pp.1-9.

[4] P. K. C. Wang and Jin Duo Wei, Vibrations in Moving Flexible Robot Arm, Journal of Sound and Vibration, 1987, Vol. 116, pp.146-160.

DOI: https://doi.org/10.1016/s0022-460x(87)81326-3

[5] Woo soon Yim, Jichun Zuang, and Sahjendra N. Singh, Experimental Two-Axis Vibration Suppression and Control of a Flexible Robot Arm, Journal of Robotic Systems. 1993, Vol 10, pp.321-343.

DOI: https://doi.org/10.1002/rob.4620100303

[6] S. Kodiyalam, G. N. Vanderplatts and H. Miura, Structure Optimization with MSC/Nastran, Computer and Structure, 1997, Vol. 40, pp.821-829.

[7] Saeed Moaveni, Finite Element Analysis Theory and Application with ANSYS, Prentice-Hall Inc., (1999).