Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

884-889

DOI:

10.4028/www.scientific.net/KEM.270-273.884

Citation:

N. Y. Kim and M. S. Hong, "Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber", Key Engineering Materials, Vols. 270-273, pp. 884-889, 2004

Online since:

August 2004

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$35.00

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