Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

884-889

Citation:

N. Y. Kim and M. S. Hong, "Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber", Key Engineering Materials, Vols. 270-273, pp. 884-889, 2004

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August 2004

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