Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process

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Key Engineering Materials (Volumes 274-276)

Edited by:

W.P. Shen and J.Q. Xu

Pages:

445-450

Citation:

S.W. Youn and C. G. Kang, "Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process ", Key Engineering Materials, Vols. 274-276, pp. 445-450, 2004

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October 2004

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