Characterization of Nanoporous Low Dielectric Polysilsesquioxane Thin Films


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Poly(methyl-co-cyclosiloxane bearing silsesquioxane)s (P(M-co-CSSQs)) were prepared. Using poly(e-caprolactone) (PCL) as a template, PCL / P(M-co-CSSQ) nanohybrid films were fabricated. The electrical, morphological, and mechanical properties of the PCL / P(M-co-CSSQ) films were investigated. The dielectric constant of a cured PCL / P(M-co-CSSQ) film at 420°C scaled down from 2.55 to 2.05 and refractive index from 1.41 to 1.33 when 20 vol. % of the PCL was admixed with the polymer matrix. The elastic modulus and hardness of the cured PCL / P(Mco- CSSQ) (2:8, vol./vol.) film were 2.50 and 0.32 GPa, respectively, showing dependency on the PCL content.



Key Engineering Materials (Volumes 277-279)

Edited by:

Kwang Hwa Chung, Yong Hyeon Shin, Sue-Nie Park, Hyun Sook Cho, Soon-Ae Yoo, Byung Joo Min, Hyo-Suk Lim and Kyung Hwa Yoo




J. Hyeon Lee et al., "Characterization of Nanoporous Low Dielectric Polysilsesquioxane Thin Films", Key Engineering Materials, Vols. 277-279, pp. 907-911, 2005

Online since:

January 2005




[1] J. Hyeon-Lee, W. C. Kim, S. K. Min, H. Rhee and D. Y. Yoon: Macromol. Mater. Eng. Vol. 288. No. 5 (2003), p.455.

[2] J. Hyeon-Lee, Y. Y. Lyu, M. S. Lee, J. -H. Hahn, J. H. Rhee, S. K. Mah, J. -H. Yim and S. Y. Kim: Macromol. Mater. Eng. Vol. 289 (2004), p.164.

[3] S. Yang, P. A. Mirau, C. -S. Pai, O. Nalamasu, E. Reichmanis, E. K. Lin, H. -J. Lee, D. W. Gidley and J. Sun: Chem. Mater. Vol. 13. No. 9 (2001), p.2762.

[4] J. Yim, Y. Lyu, H. Jeong, S. Song, I. Hwang, J. Hyeon-Lee, S. Mah, S. Chang, J. Park, Y. F. Hu, J. N. Sun and D. W. Gidley: Adv. Funct. Mater. Vol. 13. No. 4 (2003), p.382.


[5] M. Trollsas, J. L. Hedrick, D. Macerreyes, Ph. Dubois, R. Jerome, H. Iire and A. Hult: Macromol. Vol. 30 (1997), p.8508.

[6] M. Trollsas and J. L. Hedrick: J. Am. Chem. Soc. Vol. 120 (1998), p.4644.

[7] P. Mezza, J. Phalippou and R. Sempere: J. Non-Cryst. Solids Vol. 243 (1999), p.75.