Nano Pattern Mold Technology Using Nano Stamper Based on Quartz


Article Preview

In this paper, we present a reusable quartz master fabricated by electron-beam lithography and the results of the preliminary test of injection molding using the reusable quartz master. Since patterned structures of photoresist can be easily damaged by demolding process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process. We have developed a 100nm-pit sized reusable quartz master with intaglio carving patterns of finer sizes than those of DVD (400nm) and blue-ray disc (200nm). In the preliminary test of the injection molding, we have found optimum injection molding conditions using polypropylene.



Key Engineering Materials (Volumes 277-279)

Edited by:

Kwang Hwa Chung, Yong Hyeon Shin, Sue-Nie Park, Hyun Sook Cho, Soon-Ae Yoo, Byung Joo Min, Hyo-Suk Lim and Kyung Hwa Yoo






D. S. Choi et al., "Nano Pattern Mold Technology Using Nano Stamper Based on Quartz", Key Engineering Materials, Vols. 277-279, pp. 912-918, 2005

Online since:

January 2005




[1] F. Lehmann, G. Richter, T. Borzenko, V. Hock, G. Schmidt, L.W. Molenkamp, Fabrication of sub-10-nm Au-Pd structures using 30 keV electron beam lithography and lift-off , Microelectronic Engineering , Vol. 65, pp.327-333, (2003).

DOI: 10.1016/s0167-9317(02)00963-2

[2] Alexei L, Bogdanov, Tommy Holmqvist, Piotr jedrasik and Bengt Nilsson, Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production, Electronic Materials, Vol. 67-68, pp.381-389, june (2003).

DOI: 10.1016/s0167-9317(03)00093-5

[3] Sumio Hosaka, Hayato Sone, Yoshitaka Takahashi, Toshimichi Shintani, Keizo Kato and Toshiharu Saiki, SNOM imaging of very fine pits formed by EB lithography of ultrahigh density optical recording, Microelectronic Engineering, Vol 67-68, pp.728-735, June, (2003).

DOI: 10.1016/s0167-9317(03)00133-3

In order to see related information, you need to Login.