SiC Coatings Deposited by RF Magnetron Sputtering
Amorphous SiC coatings were deposited by RF magnetron sputtering from a sintered SiC target onto Si(100) substrate at room temperature. The influence of RF power on the surface morphology and the RMS surface roughness of the resulting SiC coatings was studied by using atomic force microscopy. Two types of surface morphologies were obtained. The corresponding forming mechanisms were also discussed.
Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li
H. D. Tang et al., "SiC Coatings Deposited by RF Magnetron Sputtering", Key Engineering Materials, Vols. 280-283, pp. 1309-1312, 2005