Application of Powder Blasting Techniques to Micro-Pattern Making Process for Si3N4-hBN Composites

Abstract:

Article Preview

In this study, micro powder blasting techniques are applied to micro-pattern making process using developed Si3N4-hBN composites. Material properties of the developed machinable ceramics according to the variation of h-BN contents, those are used to give good machinability to the ceramics, are evaluated. And, a series of required experimental works are performed to determine optimum powder blasting conditions for micro-pattern making. The experiments are performed for the prepared samples with no mask, and samples with three different mask patterns. As the results, it can be observed that the machinability of the developed Si3N4-hBN composites increases as the h-BN contents in the composites. Also, from the experimental results, it is possible to determine the optimum blasting conditions for micro-pattern making process with Si3N4-hBN composites.

Info:

Periodical:

Edited by:

Hai-Doo Kim, Hua-Tay Lin and Michael J. Hoffmann

Pages:

51-56

Citation:

M. W. Cho et al., "Application of Powder Blasting Techniques to Micro-Pattern Making Process for Si3N4-hBN Composites ", Key Engineering Materials, Vol. 287, pp. 51-56, 2005

Online since:

June 2005

Export:

Price:

$38.00

[1] A.W. Momber: Principles of Abrasive Water Jet Machining (Springer Verlag, Berlin 1998).

[2] J.A. McGeough: Micromachining of Engineering Materials (Marcel Dekker, New York 2001).

[3] J.A. McGeough: Advanced Methods of Machining (Kluwer, Dordrecht 1988).

[4] A. Evans, M. Gulden and M. Rosenblatt: Proc. R. Soc. London A361 (1978), p.343.

[5] G. Sheldon: Trans. ASME, J. Basic Eng. (1970), p.619.

[6] D.B. Marshall, B.R. Lawn and A.G. Evans: J. Am. Ceramic Soc. 65(11) (1982), p.561.

[7] T. Kuriyagawa, N. Yoshida and K. Syoji: Journal of the JSPE, Vol. 54, No. 6 (1998), p.881.

[8] P. Slikkerveer, P. Bouten and F. de Haas, F: Sensors and Actuators 85 (2000), p.296.

[9] A. Verma and G. Lal: Transactions of the ASME, Vol. 118 (1996), p.564.

[10] H. Wensink, U. Berenshot, V. HenriProceedings of the IEEE MEMS (2000), p.769.

[11] H. Ligthart and P. Slikkerveer: Philips J. Res., Vol. 50, No. 3/4 (1996), p.475.

[12] M. Izawa: Journal of the Society of Abrasive Machining, Vol. 44, No. 1 (2000), p.11.

[13] D. Solignac, A. Sayah, S. Constantin, S., st al.: Sensor and Actuators A 3003 (2001), p.1.

[14] E. Belloy, S. Thurre, E. Walckiers, A. Sayah and M. Gijs: Sensor and Actuators 84 (2000), p.330.

DOI: https://doi.org/10.1016/s0924-4247(00)00390-3

[15] P. Slikkerveer, P. Bouten and H. Scholten: Wear, Vol. 217 (1998), p.237.

Fetching data from Crossref.
This may take some time to load.