Fabrication of SiC-Based Ceramic Patterns via Soft Lithography of Polymeric Precursors

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Hai-Doo Kim, Hua-Tay Lin and Michael J. Hoffmann

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96-101

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K. H. Park et al., "Fabrication of SiC-Based Ceramic Patterns via Soft Lithography of Polymeric Precursors", Key Engineering Materials, Vol. 287, pp. 96-101, 2005

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June 2005

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