Fabrication of SiC-Based Ceramic Patterns via Soft Lithography of Polymeric Precursors


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Edited by:

Hai-Doo Kim, Hua-Tay Lin and Michael J. Hoffmann




K. H. Park et al., "Fabrication of SiC-Based Ceramic Patterns via Soft Lithography of Polymeric Precursors", Key Engineering Materials, Vol. 287, pp. 96-101, 2005

Online since:

June 2005




[1] C. K. Narula: Ceramic precursor technology and its applications (Marcel Dekker Publications, New York 1995).

[2] Y. Liu, L. A. Liew, R. Luo, L. An, M. L. Dunn, V. M. Bright, J. W. Daily and R. Raj: Sensors and actuators A Vol. 95 (2002), p.143.

[3] M. Mehran and A. Z. Christian: SiC MEMS: Thin solid films Vol. 355-356 (1999), p.518.

[4] H. Yang, P. Deschatelets, S. T. Brittain and G. M. Whitesides: Adv. Mater Vol. 13 (2001), p.54.

[5] E. Kim, Y. Xia and G. M. Whitesides: Nature Vol. 376 (1995), p.581.

[6] W. Teri, J. Odom, C. Love, D. Wolfe, K. Paul & G. M. Whitesides: Langmuir Vol. 18 (2002), p.5314.

[7] M. Cavallini, M. Murgia and F. Biscarini: Mater. Sci. & Eng. C Vol. 19 (2002), p.275.

[8] M. A. Schiavon, G. D. Soraru and V. P. Yoshida: J. Non-crystalline Solid Vol. 304 (2002), p.76.

[9] K. Edwin, Y. L. Li, C. Konetschny, E. Lecomte, C. Fasel and R. Riedel: Mater. Sci. Eng. R-reports Vol. 26 (2000), p.197.

[10] www. starfiresystems. com.

[11] www. ceraset. com.

[12] J. G. Kho, K. T. Moon, G. Nouet, P. Ruterana and D. P. Kim: Thin Solid Films Vol. 389 (2001), p.78.