Indentation methods have been used for the study of the hardness and deformation characteristics MoSi2. Micro-nanoindentation tests at loads from 10 mN to 2000 mN were carried out using the depth-sensing method. Measurements of the microhardness using conventional Vickers method was carried out at loads of 500 mN, 1000 mN and 2000 mN. The Universal (Martens), Plastic and conventional Vickers hardness values were calculated at different indentation loads. Evident indentation load - size effect was found in both materials. According to the results, the pre-strain reduces the micro-nano hardness values, probably due to the activation of slip systems during the high-temperature deformation.