Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

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Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

89-94

DOI:

10.4028/www.scientific.net/KEM.295-296.89

Citation:

C. J. Chen et al., "Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer", Key Engineering Materials, Vols. 295-296, pp. 89-94, 2005

Online since:

October 2005

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$35.00

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