The effective fracture toughness testing of materials intended for application in MicroElectroMechanical Systems (MEMS) devices is required in order to improve understanding of how they may be expected to perform upon the micro scale. γ-TiAl based materials are being considered for application in MEMS devices required to operate at elevated temperatures. The effect of different preparation methods upon resulting fracture toughness and development of testing methods for these devices is therefore of importance. Micro-sized cantilevers of the γ-TiAl alloy “Alloy 7” (Ti-46Al-5Nb-1W) were therefore prepared using either mechanical or chemical final stage polishing and subsequently used to evaluate fracture toughness. The effectiveness of the evaluation of micro-sized samples of γ-TiAl in this manner is considered, as well as the effects of the different processing methods and variations in properties according to lamellar orientation.