Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching
Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H2 in air.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
K. Tajima et al., "Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching", Key Engineering Materials, Vol. 301, pp. 273-276, 2006