Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching

Abstract:

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Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H2 in air.

Info:

Periodical:

Edited by:

Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

273-276

DOI:

10.4028/www.scientific.net/KEM.301.273

Citation:

K. Tajima et al., "Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching", Key Engineering Materials, Vol. 301, pp. 273-276, 2006

Online since:

January 2006

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Price:

$35.00

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