Fast Positioning Technology of High Acceleration Stage
Profiting from its high stiffness and ratio of push to weight, the stage directly driven by linear motor can reach extremely high acceleration. However, because the stage doesn’t have transmission parts, signals of the control system may excite high frequency vibrations in it directly, which limit the tuning range of controller’s parameters, prolong the stage’s settle time and influence its efficiency and positioning performance. This paper presents the stage’s dynamic characteristics by modeling simulation and experimental modal analysis (EMA). According to the dynamic characteristics, a time delay filter (TDF) is used in the controller, then the stage’s vibrations are restrained and its settle time is reduced distinctly.
Zhejun Yuan, Xipeng Xu, Dunwen Zuo, Julong Yuan and Yingxue Yao
Y. T. Li and H. Ding, "Fast Positioning Technology of High Acceleration Stage", Key Engineering Materials, Vols. 315-316, pp. 817-821, 2006