Mechanical Properties of Sol-Gel Inorganic-Organic Hybrid Films in Nanoindentation


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Methylsilsesquioxane films were formed on glass substrates by dropping a sol prepared from methyltriethoxysilane and then heat-treated in an oven. Nanoindentation test was performed to assess the elastoplastic properties of the films, including the relative residual depth ξr, Meyer hardness HM, work-of-indentation WI and the elastic modulus E’. The values of ξr, HM and WI were obtained by a Berkovich indenter and E’ was determined by a spherical indenter on the basis of Hertz elastic theory. ξr decreased with the increase in the heat treatment time, whereas HM , WI and E’ significantly increased with the time. The changes in the mechanical properties with the heat treatment time well reflected the evolution of the Si-O-Si network structure in methylsilsequioxane film.



Key Engineering Materials (Volumes 317-318)

Edited by:

T. Ohji, T. Sekino and K. Niihara




J.Q. Zhang et al., "Mechanical Properties of Sol-Gel Inorganic-Organic Hybrid Films in Nanoindentation", Key Engineering Materials, Vols. 317-318, pp. 317-322, 2006

Online since:

August 2006




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