Mechanical Properties of Sol-Gel Inorganic-Organic Hybrid Films in Nanoindentation


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Methylsilsesquioxane films were formed on glass substrates by dropping a sol prepared from methyltriethoxysilane and then heat-treated in an oven. Nanoindentation test was performed to assess the elastoplastic properties of the films, including the relative residual depth ξr, Meyer hardness HM, work-of-indentation WI and the elastic modulus E’. The values of ξr, HM and WI were obtained by a Berkovich indenter and E’ was determined by a spherical indenter on the basis of Hertz elastic theory. ξr decreased with the increase in the heat treatment time, whereas HM , WI and E’ significantly increased with the time. The changes in the mechanical properties with the heat treatment time well reflected the evolution of the Si-O-Si network structure in methylsilsequioxane film.



Key Engineering Materials (Volumes 317-318)

Edited by:

T. Ohji, T. Sekino and K. Niihara




J.Q. Zhang et al., "Mechanical Properties of Sol-Gel Inorganic-Organic Hybrid Films in Nanoindentation", Key Engineering Materials, Vols. 317-318, pp. 317-322, 2006

Online since:

August 2006




[1] A. Maia Seco, M. Clara Goncalves and Rui M. Almeida: Mater. Sci. Eng. B 76 (2000), p.193.

[2] W. Que and X. Hu: Opt. Mater. 22 (2003), p.31.

[3] A. Matsuda, Y. Matsuno, M. Tatsumisago and T. Minami: J. Am. Ceram. 81 (1998), p.2849.

[4] A. J. Atanacio, B. A. Latella, C. J. Barbé and M. V. Swain: Surface and Coatings Tech. in press.

[5] M. Schulze and W. D. Nix: Int. J. Solids Struct. 37 (2000), p.1045.

[6] J. Malzbender, G. de With and J. M. J. den Toonder: Thin Solid Films 372 (2000), p.134.

[7] M. Sakai and Y. Nakano: J. Mater. Res. 17 (2002), p.2161.

[8] J. Zhang and M. Sakai: Mater. Sci. Eng. A 381 (2004), p.62.

[9] M. Sakai: Acta Metall. Mater. 41 (1993), p.1751.

[10] M. Sakai: J. Mater. Res. 14 (1999), p.3630.

[11] K. L. Johnson: Contact Mechanics, Chap. 4, Cambridge Uni. Press, Cambridge, (1985).

[12] N. B. Colthup, L. H. Daly and S. E. Wiberley: Introduction to Infrared and Raman Spectroscopy, Academic Press, New York, (1964).