Near-Infrared Light Emission from of Er-Doped ZnO Thin Film in Micropits Processed on Si Substrate

Abstract:

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We have obtained Er-doped ZnO thin film in a micropattern of reverse trapezoids processed on Si substrate by sputtering and ultrafine polishing techniques. Near-infrared light emission was detected successfully from the thin film filling a single micropit with 10 μm square. Transmission electron microscopy (TEM) observation showed epitaxial growth of ZnO crystals along the curvature of the micropit.

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Periodical:

Edited by:

Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

113-116

DOI:

10.4028/www.scientific.net/KEM.320.113

Citation:

S. Tanaka et al., "Near-Infrared Light Emission from of Er-Doped ZnO Thin Film in Micropits Processed on Si Substrate", Key Engineering Materials, Vol. 320, pp. 113-116, 2006

Online since:

September 2006

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$35.00

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