Near-Infrared Light Emission from of Er-Doped ZnO Thin Film in Micropits Processed on Si Substrate
We have obtained Er-doped ZnO thin film in a micropattern of reverse trapezoids processed on Si substrate by sputtering and ultrafine polishing techniques. Near-infrared light emission was detected successfully from the thin film filling a single micropit with 10 μm square. Transmission electron microscopy (TEM) observation showed epitaxial growth of ZnO crystals along the curvature of the micropit.
Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
S. Tanaka et al., "Near-Infrared Light Emission from of Er-Doped ZnO Thin Film in Micropits Processed on Si Substrate", Key Engineering Materials, Vol. 320, pp. 113-116, 2006