Fabrication and Application of MoSi2 Thin Film Electric Heaters

Abstract:

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Thin-film heaters made of molybdenum silicide (MoSi2) were fabricated by RF magnetron sputtering, and the heating characteristics of these heaters in a high vacuum were evaluated. The crystal structure of thin-film was hexagonal contrary to the tetragonal one of the target. MoSi2 thin-film heaters deposited outside an alumina crucible showed almost linear resistance-temperature (R-T ) characteristics. However, resistance decreased due to repeated heatings. The heaters generated almost no contamination in vacuum. The temperature of the crucible reached 1000°C at an electric power of 190 W.

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Periodical:

Edited by:

Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

95-98

DOI:

10.4028/www.scientific.net/KEM.320.95

Citation:

Y. Itoh et al., "Fabrication and Application of MoSi2 Thin Film Electric Heaters", Key Engineering Materials, Vol. 320, pp. 95-98, 2006

Online since:

September 2006

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$35.00

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