Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation

Abstract:

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In this study, we performed fracture tests on thermally aged DLC thin films by using micro-indentation and nano-indentation and investigated the deformation and fracture characteristics of these films. The aged high hydrogen films have better characteristics such as thermal and mechanical stability than low hydrogen films.

Info:

Periodical:

Key Engineering Materials (Volumes 321-323)

Edited by:

Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi

Pages:

1374-1376

DOI:

10.4028/www.scientific.net/KEM.321-323.1374

Citation:

S. Baek et al., "Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation", Key Engineering Materials, Vols. 321-323, pp. 1374-1376, 2006

Online since:

October 2006

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Price:

$38.00

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