Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation


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In this study, we performed fracture tests on thermally aged DLC thin films by using micro-indentation and nano-indentation and investigated the deformation and fracture characteristics of these films. The aged high hydrogen films have better characteristics such as thermal and mechanical stability than low hydrogen films.



Key Engineering Materials (Volumes 321-323)

Edited by:

Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi




S. Baek et al., "Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation", Key Engineering Materials, Vols. 321-323, pp. 1374-1376, 2006

Online since:

October 2006




[1] Tallant, D.R., Parmeter, J.E., Siegal, M.P., Simpson, R.L.: Diamond and Related Materials, 1995, 4, 191-199.

[2] Dukino. R, Swain. N. V.: Comparative measurement of indentation fracture toughness with Berkovich and Vickers indenters, Journal of American Ceramics Society. 75 , 1992, 32993304.


[3] Nastasi, M., Kodali, P., Walter, K.C., Embury, J.D.: Journal of Materials Research, 1999, 14/5: 2173-2180.

[4] X.D. LI., D.F. Diao., B. Bhushan.; Acta Materiallia , 1997, 45, 4453-4461.

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