Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation
In this study, we performed fracture tests on thermally aged DLC thin films by using micro-indentation and nano-indentation and investigated the deformation and fracture characteristics of these films. The aged high hydrogen films have better characteristics such as thermal and mechanical stability than low hydrogen films.
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi
S. Baek, J. M. Koo, C. S. Seok, "Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation", Key Engineering Materials, Vols. 321-323, pp. 1374-1376, 2006