(110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter

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To fabricate a (110) silicon hard master, we used anisotropic wet etching. The etching chemical for the silicon wafer was a TMAH 25% solution. We fabricated a 1x4 multimode planar waveguide splitter using the silicon hard master. Organic-inorganic hybrid materials were used as core and cladding layers of the planar waveguide splitter. The 15 μm-thick under-cladding layer was coated on a silicon substrate and baked. After the core layer was coated on the under-cladding layer, the core pattern was formed by using a hot embossing process at 100 °C and 1-3 kg/cm2. The propagation loss of the planar waveguide was 0.4 dB/cm and the insertion loss of the 1x4 planar waveguide splitter was 11.2 dB at the total splitter length of 3.5 cm.

Info:

Periodical:

Key Engineering Materials (Volumes 321-323)

Edited by:

Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi

Pages:

1704-1706

DOI:

10.4028/www.scientific.net/KEM.321-323.1704

Citation:

Y. M. Jung et al., "(110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter", Key Engineering Materials, Vols. 321-323, pp. 1704-1706, 2006

Online since:

October 2006

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$35.00

[1] N. Savage: IEEE Spectrum, Vol. 39 (2002), p.32.

[2] W. S. Kim, J. H. Lee, S. Y. Shin, B. S. Bae, and Y. C. Kim: IEEE Photonics Technol. Lett., Vol. 16 (2004), p.1888.

[3] M. Hikita, S. Tomaru, K. Enbutsu, N. Ooba, R. Yoshimura, M. Usui, T. Yoshida, and S. Imamura: IEEE J, Vol. 5 (1999), p.1237.

[4] M. T. Gale, C. Gimkiewicz, S. Obi, M. Schnieper, J. Sochitg, H. Thiele, and S. Westenhofer: Optics and Lasers in Engineering, Vol. 43 (2005), p.373.

DOI: 10.1016/j.optlaseng.2004.02.007

[5] S. Y. Chou, P.R. Krauss, P.J. Rennstrom: J. Vac. Sci. Technol., B Vol. 14 (1996), p.4129.

[6] S. Y. Chou, P.R. Krauss, W. Zhang, L. Guo, and L. Zhang: J. Vac. Sci. Technol., B Vol. 15 (1997), p.2897.

[7] T. Bailey, B.J. Choi, M. Colburn, M. Meissl, S. Shaya, J.G. Ekerdt, S.V. Sreenivasan, and C.G. Willson: J. Vac. Sci. Technol., B Vol. 18 (2000), p.3572.

DOI: 10.1116/1.1324618

[8] C. Park, J. Yoon, E.L. Thomas: Polymer Vol. 44 (2003), p.6725.

[9] Y. Xia and G.M. Whitesides: Angew. Chem., Int. Ed. Vol. 37 (1998), p.550.

[10] Y. M. Jung and Y. C. Kim, Multi-mode Planar Waveguide Fabricated by a (110) Silicon Hard Master, Korean Institute of Electrical and Electronic Material Eng. Vol. 18 (2005), p.1106.

DOI: 10.4313/jkem.2005.18.12.1106

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