Optically Encoded Smart Dust from DBR Porous Silicon
Distributed Bragg reflector (DBR) porous silicons exhibiting unique reflectivity were successfully obtained by an electrochemical etching of silicon wafer using square wave currents. Optically encoded smart dust which retained optical reflectivity was obtained from DBR porous silicon film in organic solution by using ultra-sono method. The size of optically encoded smart dust was measured by field emission scanning electron micrograph (FESEM) and was about 500 nm to few microns depending on the duration of sonication. Investigation for the optical characteristics of smart dust revealed that smart dust could be useful for application such as chemical sensor for detecting organic vapors.
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi
B. J. Lee, S. G. Kim, H. L. Sohn, "Optically Encoded Smart Dust from DBR Porous Silicon", Key Engineering Materials, Vols. 321-323, pp. 53-56, 2006