Crystal Plasticity Analysis of Thermal Deformation and Dislocation Accumulation in ULSI Cells

Abstract:

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Thermal stress, plastic slip deformation and accumulation of dislocations in shallow trench isolation (STI) type ULSI devices when the temperature drops from 1000 し to room temperature are analyzed by a crystal plasticity analysis cord. The results show that dislocation accumulation takes place at the temperature range over 800 し, and the difference of 6 MPa in the lattice friction stress at 1000 し!causes increase of dislocation density more than 1.6 times. Dislocations generate and accumulate at the shoulder part of the device area and bottom corners of the trench. Dislocations are categorized into two groups. In one group, dislocation lines are mostly straight and parallel to the trench direction, and in the other group, dislocations make half loop type structure. Possibilities for the suppression of dislocation accumulation through control of lattice friction stress at high temperature region are discussed.

Info:

Periodical:

Key Engineering Materials (Volumes 324-325)

Edited by:

M.H. Aliabadi, Qingfen Li, Li Li and F.-G. Buchholz

Pages:

1035-1038

DOI:

10.4028/www.scientific.net/KEM.324-325.1035

Citation:

M. Sato et al., "Crystal Plasticity Analysis of Thermal Deformation and Dislocation Accumulation in ULSI Cells ", Key Engineering Materials, Vols. 324-325, pp. 1035-1038, 2006

Online since:

November 2006

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Price:

$35.00

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