Nano-Grating Fabrication Technique

Abstract:

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In this paper, a novel nano-moiré grating fabrication technique was proposed for nanometer deformation measurement. The grating fabrication process was performed with the aid of Atomic Force Microscope (AFM) on the basis of micro-fabrication technique. On the analysis of some correlative factors of influencing grating line quality, some important experimental parameters were optimized. In this study, some parallel and cross nano-gratings with frequencies of from 10000lines/mm to 20000lines/mm were fabricated. The successful experimental results demonstrate that the nano-grating fabrication technique is feasible and also indicated that these nano-gratings with nano-moiré method can be applied to deformation measurement, which offers a nanometer sensitivity and spatial resolution.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

131-134

DOI:

10.4028/www.scientific.net/KEM.326-328.131

Citation:

H. M. Xie et al., "Nano-Grating Fabrication Technique", Key Engineering Materials, Vols. 326-328, pp. 131-134, 2006

Online since:

December 2006

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Price:

$35.00

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[4] H. M. Xie and Z.W. Liu. Measurement Science and Technique Vol. 15 (2004), p.1716 200nnm.

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